Zhang, X. et al. Atomic lift-off of epitaxial membranes for cooling-free infrared detection. Nature 641, 98–105 (2025). Article ADS CAS PubMed Google Scholar Zhu, J. et al. Low-thermal-budget synthesis of monolayer molybdenum disulfide for silicon back-end-of-line integration on a 200 mm platform. Nat. Nanotechnol. 18, 456–463 (2023). Article ADS CAS PubMed Google Scholar Hutmacher, F.
